Paywall. From https://www.msn.com/en-us/money/other/taiwan-semiconductor-pauses-some-chipmaking-no-damage-to-critical-tools-after-earthquake-hits-island-nation-

Paywall. From https://www.msn.com/en-us/money/other/taiwan-semiconductor-pauses-some-chipmaking-no-damage-to-critical-tools-after-earthquake-hits-island-nation-update/ar-BB1l0wte https://www.msn.com/en-us/money/other/taiwan-semiconductor-p... : "A small number of tools were damaged at certain facilities, partially impacting their operations. However, there is no damage to our critical tools including all of our extreme ultraviolet (EUV) lithography tools," TSM said in an emailed statement to Seeking Alpha.