My money's on some of the optics. https://www.zeiss.com/semiconductor-manufacturing-technology/smt-magazine/high-na-euv-lithography.html https://www.zeiss.com/

My money's on some of the optics. https://www.zeiss.com/semiconductor-manufacturing-technology/smt-magazine/high-na-euv-lithography.html https://www.zeiss.com/semiconductor-manufacturing-technology... https://www.trumpf.com/en_US/products/lasers/euv-drive-laser/ https://www.trumpf.com/en_US/products/lasers/euv-drive-laser... https://www.cymer.com/wp-content/uploads/2018/12/Cymer_SPIE_AdvancedLithography_2011.pdf https://www.cymer.com/wp-content/uploads/2018/12/Cymer_SPIE_...