They won't break, but they may screw-up in-progress wafers and need to be realigned. You're right that they're incredibly sensitive, and they've built this into

They won't break, but they may screw-up in-progress wafers and need to be realigned. You're right that they're incredibly sensitive, and they've built this into the design of the fab. They float the masks, objectives, and wafers on pneumatic isolators (separate stages for each, I believe). Extra-sensitive machines will also be individually isolated from the rest of the fab to prevent adjacent machines and footsteps from interfering. Here's an example of a common pneumatic isolator, the kind of which can be found in almost every lab making optics: https://www.newport.com/f/pneumatic-vibration-isolators-with-automatic-re-leveling https://www.newport.com/f/pneumatic-vibration-isolators-with...