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Canon "exited" the race earlier than that. Canon makes KrF scanners, but chose not to pursue ArF scanners. Nikon and ASML did pursue ArF (which were introduced
by formerly_proven 3y ago
Canon "exited" the race earlier than that. Canon makes KrF scanners, but chose not to pursue ArF scanners. Nikon and ASML did pursue ArF (which were introduced late 90s/early 2000s), later Nikon chose to not pursue EUV scanners, leaving only ASML in that market.
- formerly_proven 3y agoOh and just to clarify, by "Nikon chose to not pursue EUV" I of course mean "the US made sure the japs can't access the relevant technology because they were market leaders at the time".
- rjzzleep 3y agoDo you have in references for the US involvement in Nikon's decision to drop EUV?
- formerly_proven 3y agohttps://brie.berkeley.edu/sites/default/files/wp118.pdf https://brie.berkeley.edu/sites/default/files/wp118.pdf