It's almost entirely a function of wavelength and aperture diameter. It's basic wave mechanics, and is almost impossible to improve upon. I just recently watch

It's almost entirely a function of wavelength and aperture diameter. It's basic wave mechanics, and is almost impossible to improve upon. I just recently watched a great video explaining how lithography machines push the limits of what's possible: https://www.youtube.com/watch?v=rdlZ8KYVtPU&t=1151s https://www.youtube.com/watch?v=rdlZ8KYVtPU&t=1151s Note that the best ASML machines can eke out an improvement on the order of a factor of two at best, not two thousand, which is what would be likely needed to power space probes at light-year distances.