2 ms·
Where does ASML (and the industry) go after EUV? They are currently at 10E-9 m wavelengths, right up against the x-ray spectrum, and you can't focus that kind
by fulladder 3y ago
Where does ASML (and the industry) go after EUV?
They are currently at 10E-9 m wavelengths, right up against the x-ray spectrum, and you can't focus that kind of light with glass optics.