You are definitely onto something. If you relax several manufacturing & design constraints, you can go from requiring a $3bn facility to something that can be

You are definitely onto something. If you relax several manufacturing & design constraints, you can go from requiring a $3bn facility to something that can be made in a high-end lab or even a fancy garage. There are smaller-scale techniques for EUV light generation. E.g.: https://www.energetiq.com/euv-selection-guide https://www.energetiq.com/euv-selection-guide The time constraint is probably the most severe one. If you are willing to wait a week for your wafer to get dosed for every layer, you have a lot more options available than a foundry does.