19 ms·
The math works out a lot better when you’re upgrading pre-EUV fabs or expanding an existing facility. A lot of the gear and setup is mostly the same such as waf
by throwup238 3y ago
The math works out a lot better when you’re upgrading pre-EUV fabs or expanding an existing facility. A lot of the gear and setup is mostly the same such as wafer cleaning, HVAC and isolation, etc and the local challenges to setup and labor have been figured out.
- ls612 3y agoWhatever is the best they can make a DUV, planar process do will be used for decades to come.