The US government did a lot of EUV research through the 1990s via three national labs (Livermore, Berkeley and Sandia). Then when trying to commercialize it a c

The US government did a lot of EUV research through the 1990s via three national labs (Livermore, Berkeley and Sandia). Then when trying to commercialize it a consortium of US companies were involved. ASML, Canon and Nikon were also interested by only ASML was allowed in. Ultimately ASML acquired SVG and became the sole benefactor of this research at that time. ASML agreed to maintain US production and R&D as part of this. It also gives US some leverage to deny sales of that technology to China. https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography#History https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithograph...