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>ASML machines consist of at least two main parts: laser and lenses. Both has been engineered by third-party firms: TRUMPF (laser) and Carl Zeiss (lenses). Cor
by FirmwareBurner 3y ago
>ASML machines consist of at least two main parts: laser and lenses. Both has been engineered by third-party firms: TRUMPF (laser) and Carl Zeiss (lenses).
Correction: not lasers and lenses, but EUV light-source and mirrors.
The TRUMPF laser in the EUV machines is nothing too special, but the Cymer EUV light source, consisting of blasting tin microdroplets at the right angles at speed, with said lasers, is the secret sauce.
And mirrors are used instead, because lenses would absorb the EUV radiation.