> How do you even create a mask of that size? https://en.wikipedia.org/wiki/Electron-beam_lithography https://en.wikipedia.org/wiki/Electron-beam_lithography

> How do you even create a mask of that size? https://en.wikipedia.org/wiki/Electron-beam_lithography https://en.wikipedia.org/wiki/Electron-beam_lithography It can easily make small features, the only issue is low throughput, insufficient for mass production. But it's widely used to make masks. (however, "5nm" in this case means nothing)