I think the idea is that you only have to make far fewer masks than wafers, so you can make it slowly. I'm sure it's quite difficult to make, and Canon must hav

I think the idea is that you only have to make far fewer masks than wafers, so you can make it slowly. I'm sure it's quite difficult to make, and Canon must have been working to get it right for quite some time. Good to see they haven't given up in their competition with ASML.