3 ms·
How many impressions can you get out of each mask before it has to be discarded? Last time I heard about this tech, that was the limiting factor. This uses e-
by KirillPanov 3y ago
How many impressions can you get out of each mask before it has to be discarded? Last time I heard about this tech, that was the limiting factor.
This uses e-beams to make the mask, right? Edit: here's their research paper (7 years old but note the identical model name FPA-1200NZ2C):
http://cnt.canon.com/wp-content/uploads/2016/08/Nanoimprint-system-development.pdf http://cnt.canon.com/wp-content/uploads/2016/08/Nanoimprint-...
Turns out they e-beam a "master mask" and then use that as an imprint to create "replica masks". Then the "replica masks" imprint the wafers. Sadly you still have to start with a crazy-expensive e-beam mask.
- buildbot 3y agoHow crazy expensive? I thought masks where already very, very expensive?
- Animats 3y agoWikipedia says that silicon molds are good for a few thousand prints, and nickel molds for up to 10,000. [1] That's encouraging. E-beam systems work fine, but the write times are in tens of hours.[2] [1] https://en.wikipedia.org/wiki/Nanoimprint_lithography https://en.wikipedia.org/wiki/Nanoimprint_lithography [2] https://www.ebeam.org/docs/eBeam-Mask-Maker-Survey-2020.pdf https://www.ebeam.org/docs/eBeam-Mask-Maker-Survey-2020.pdf