EUV has quite the history: https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography#History https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithograph...

EUV has quite the history: https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography#History https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithograph... > "Congress denied Japanese companies the necessary permission as they were perceived as strong technical competitors at the time"