3 ms·
This is just an alternate EUV light source. I don't think the light source is the hard part of building systems for 2 nm lithography.
by ooterness 3y ago
This is just an alternate EUV light source. I don't think the light source is the hard part of building systems for 2 nm lithography.
- rbanffy 3y agoASML does that by vaporizing tiny droplets of tin while they are in free-fall in a vacuum by hitting them with very precisely timed laser pulses. This light source took years to develop and ASML opted to do it this way because the development risks were lower considering their previous experience with similar less extreme UV light sources.