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The article says its SSMB which is a hybrid of synchrotron and a linear free electron laser. https://www.quora.com/What-is-a-Synchrotron-SSMB-generated-EUV-li
by jschlesser 3y ago
The article says its SSMB which is a hybrid of synchrotron and a linear free electron laser. https://www.quora.com/What-is-a-Synchrotron-SSMB-generated-EUV-light-source-and-how-soon-can-it-be-used-in-the-high-volume-manufacture-of-semiconductors https://www.quora.com/What-is-a-Synchrotron-SSMB-generated-E...