It comes down to what the cost delta ends up being between FinFETs and GAAFETs, and if that's where the discontinuity is. I suspect that, even though EUV is "so

It comes down to what the cost delta ends up being between FinFETs and GAAFETs, and if that's where the discontinuity is. I suspect that, even though EUV is "solved" now, the solutions are so expensive and sketchy that the DUV/EUV break is more likely to be important, with the final DUV processes being very long-lived. Unclear where this will end up exactly; I'd expect to see mature 7 nm DUV processes, but it's possible that the economics will either favor maturation of DUV + one or two EUV layers, or that a pure DUV 10 nm process with less multi-patterning ends up maturing so much cheaper that that wins out.