3 ms·
You hit the nail on the head. SMIC can get a bit further with DUV, but they are certainly going to get eaten up with multi patterning. The additional cost and
by reportingsjr 3y ago
You hit the nail on the head.
SMIC can get a bit further with DUV, but they are certainly going to get eaten up with multi patterning. The additional cost and complexity from this will be significant.