3 ms·
At Imec I recall electron beam lithography was investigated but just too slow. E-beam was analogous to an inkjet printer.
by martin_drapeau 3y ago
At Imec I recall electron beam lithography was investigated but just too slow. E-beam was analogous to an inkjet printer.
- Animats 3y agoWhatever happened to Multibeam? [1] They claim to sell a multiple electron beam writer for maskless chip making. They, and their predecessor company, have been at this since 1980. Not much new on the web site, and their last press release was in 2020. EUV masks are made that way, slowly. [1] https://multibeamcorp.com/ https://multibeamcorp.com/