In the industry they are very literally called "tools". No one calls them "machines". E.g., "the fab is ordering another six EUV tools". Similarly a lathe or v

In the industry they are very literally called "tools". No one calls them "machines". E.g., "the fab is ordering another six EUV tools". Similarly a lathe or vertical mill is "a machine tool". They're ideally suited for a very specific task in the process of making a thing. It's possible for something to be both a machine and a tool. If we're being pedantic, the ASML tools (and indeed any modern wafer fabrication equipment) are also robots. More related to the business of tool making broadly, however, the entire industry of semiconductor wafer fabrication equipment (WFE) is quite profitable and margins tend to be generous. Much of the industry is very technical and does involve "bleeding edge technology", but not all of it. The publicly traded Japanese company Disco makes tools for wafer grinding[1], which are not really any more complex than your typical computer-controlled metal cutting machine tools, yet they are quite profitable[2]. Just look at those headline margin figures! It seems to be a matter of niche and competition. [1]: https://www.disco.co.jp/eg/products/grinder/dfg8560.html https://www.disco.co.jp/eg/products/grinder/dfg8560.html [2]: https://www.disco.co.jp/eg/ir/library/doc/film/20230420.pdf https://www.disco.co.jp/eg/ir/library/doc/film/20230420.pdf