If your tool is an integral part of a larger chain, as is the case for ASML's machines being in the chain of silicon chips, that's a different story than a tool

If your tool is an integral part of a larger chain, as is the case for ASML's machines being in the chain of silicon chips, that's a different story than a tool which simply eases the process by a small factor. UV lithography is the only way to make advanced chips required for various other tools and appliances, but an OS debugger (as the author puts it) is just a nicer printf. There's big money in one, and small money in the other.