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If I recall well a documentary about ASML, each photolitography tool has such trained individual attributed during its whole life time. And that was for "simple
by sylware 3y ago
If I recall well a documentary about ASML, each photolitography tool has such trained individual attributed during its whole life time. And that was for "simple" DUV tools (immersion photolitography).
So for the EUV-HighNA tools...