Here's a good docu about ASML that shows some of the challenges in making these machines: https://www.vpro.nl/programmas/tegenlicht/kijk/backlight/asmls-secret.

Here's a good docu about ASML that shows some of the challenges in making these machines: https://www.vpro.nl/programmas/tegenlicht/kijk/backlight/asmls-secret.html https://www.vpro.nl/programmas/tegenlicht/kijk/backlight/asm...