Individual silicon atoms in a crystal are around 0.2nm apart. https://www.princeton.edu/~maelabs/mae324/glos324/silicon.htm https://www.princeton.edu/~maelabs

Individual silicon atoms in a crystal are around 0.2nm apart. https://www.princeton.edu/~maelabs/mae324/glos324/silicon.htm https://www.princeton.edu/~maelabs/mae324/glos324/silicon.ht... So no, you don't get drill bits that are 1-2 atoms wide. Also it would take a long time to "drill" a useful number of holes if you do it one by one. Use X-ray lithography maybe? The wavelength can be short enough and it might be more feasible to do in bulk.