2 ms·
In one way, you are correct. TSMC's decision to use "Black Diamond" CVD was driven by previous failures of "spin-on" dielectric that allowed them to deliver co
by chasil 4y ago
In one way, you are correct.
TSMC's decision to use "Black Diamond" CVD was driven by previous failures of "spin-on" dielectric that allowed them to deliver copper interconnects before anyone else.
However, the R&D cycle, which failed for "spin-on," otherwise allowed TSMC to deliver faster, as they ran in multiple shifts, allowing accelerated focus on the new node.