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The interview that I posted above discusses copper interconnects that IBM research introduced. TSMC had previously used a "spin-on" dialectic technique at a pr
by chasil 4y ago
The interview that I posted above discusses copper interconnects that IBM research introduced.
TSMC had previously used a "spin-on" dialectic technique at a previous node, and reverted to CVD because of problems.
They were able to beat all other manufacturers to market with copper interconnects (including IBM), because they avoided spin-on, which worked well in testing, but not in production.
They had great luck in gaining this prior experience.