3 ms·
There is also electron beam lithography which draws the lines one by one instead of illuminating an entire die in one exposure.
by WJW 4y ago
There is also electron beam lithography which draws the lines one by one instead of illuminating an entire die in one exposure.
- brennanpeterson 4y agoFor a very low density experiment and. A few other cases, it is an option. Or for mask writing. It is very informative to consider the data rate. To approximate (and perhaps do bad phone math) lithography tool has ~1bit per 10nm^2, doing 1 field ever 20s. Or 600mm^2/20s. 30mm^2/s, or about 3E12 bits/s. That's amazing.