I wish we would get a picture with all those metrics. That said, all of those metrics seem huge to what EUV HighNA can do: I remember near "perfect" 7nm "lines

I wish we would get a picture with all those metrics. That said, all of those metrics seem huge to what EUV HighNA can do: I remember near "perfect" 7nm "lines" in photoresist. I wonder what is the resolution of the motors to align all that (I guess piezo electric). And interferometers for alignment, x-rays??