5 ms·
Maybe an alignment marker for layer stacking.
by qwezxcrty 4y ago
Maybe an alignment marker for layer stacking.
- sweetjuly 4y agoYup! These sorts of crosses are used to align photolithography masks. Here's a similar example: https://www.seas.upenn.edu/~nanosop/images/alignmentmarks2.png https://www.seas.upenn.edu/~nanosop/images/alignmentmarks2.p... There are a lot of other structures used to characterize the alignment and other fancy structures which support machine alignment for newer (than like the 90s) processes.