36 ms·
Is that a Swiss flag on the lower-left corner, or some kind of pads?
by MonkeyClub 4y ago
Is that a Swiss flag on the lower-left corner, or some kind of pads?
- faefox 4y agoMaybe a fiducial marker?
- lightedman 4y agoCorrect, this is an alignment fiducial for doping to ensure everything is in proper rotational alignment before masking and doping.
- qwezxcrty 4y agoMaybe an alignment marker for layer stacking.
- sweetjuly 4y agoYup! These sorts of crosses are used to align photolithography masks. Here's a similar example: https://www.seas.upenn.edu/~nanosop/images/alignmentmarks2.png https://www.seas.upenn.edu/~nanosop/images/alignmentmarks2.p... There are a lot of other structures used to characterize the alignment and other fancy structures which support machine alignment for newer (than like the 90s) processes.
- MayeulC 4y agoPossibly a (coarse, as it's the topmost) mask alignment target.