3 ms·
I don't think that was true. Gigaphoton achieved similar numbers to Cymer roughly a year later with a very similar design idea (so unclear why they would have h
by welterde 4y ago
I don't think that was true. Gigaphoton achieved similar numbers to Cymer roughly a year later with a very similar design idea (so unclear why they would have had no path forward? they are still on-par today with Cymer as far as I can tell), XTREME was not too far behind (within factor 3 I would say).