3 ms·
Only one that worked is patently incorrect, since early ASML R&D units shipped with non-cymer EUV light sources (some Philips collaboration iirc). Best performa
by welterde 4y ago
Only one that worked is patently incorrect, since early ASML R&D units shipped with non-cymer EUV light sources (some Philips collaboration iirc).
Best performance at the time maybe (be it reliability/output power/size/..), but not the only one that worked at all, so no..
- xadhominemx 4y agoThey other light sources were orders of magnitude below the required brightness with no path to required commercial brightness, ie they didn’t work
- welterde 4y agoI don't think that was true. Gigaphoton achieved similar numbers to Cymer roughly a year later with a very similar design idea (so unclear why they would have had no path forward? they are still on-par today with Cymer as far as I can tell), XTREME was not too far behind (within factor 3 I would say).