I think it's more that they didn't try ('till now) 'cause they thought ASML's machines just weren't ready for prime time. TSMC bought ASML's bleeding edge EUV m

I think it's more that they didn't try ('till now) 'cause they thought ASML's machines just weren't ready for prime time. TSMC bought ASML's bleeding edge EUV machines thinking they could make it work eventually, and they did. Intel may catch up very quickly now.