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It looks like small piece of tin is where the magic begins [1]: > An EUV system uses a high-energy laser that fires on a microscopic droplet of molten tin and
by nomel 4y ago
It looks like small piece of tin is where the magic begins [1]:
> An EUV system uses a high-energy laser that fires on a microscopic droplet of molten tin and turns it into plasma, emitting EUV light, which then is focused into a beam.
is the spectrum naturally pure, or is there some filtering/selection going on?
> The tricky thing with EUV light is that it’s absorbed by everything, even air. That’s why an EUV system has a large high-vacuum chamber in which the light can travel far enough to land on the wafer. The light is guided by a series of ultra-reflective mirrors
The system uses 1MW of power!
1. https://medium.com/@ASMLcompany/a-backgrounder-on-extreme-ultraviolet-euv-lithography-a5fccb8e99f4 https://medium.com/@ASMLcompany/a-backgrounder-on-extreme-ul...
- throwawaymaths 4y agoThere's filtering, but the spectrum should have (near) discrete wavelengths that it emits at selectively
- pas 4y agoahahah, that's not even the craziest thing about EUV. it's that the whole process has two actual laser shots, there is a preshot that heats the tin, forms a plasma that is shaped like a lens. and then comes the stronger, main shot. https://www.degruyter.com/document/doi/10.1515/aot-2017-0029/html https://www.degruyter.com/document/doi/10.1515/aot-2017-0029... see pre-pulse part.