I know nothing about Intel's internal organization. There were several different light source ideas tried. Some at US national laboratories. Tin plasma was kno

I know nothing about Intel's internal organization. There were several different light source ideas tried. Some at US national laboratories. Tin plasma was known to work but it left so much debris that it gummed up the optics so it was forgotten for a while. The key turned out to be tin microdroplets. https://www.optica-opn.org/home/articles/volume_29/march_2018/features/euv_light_sources_for_next-gen_lithography/ https://www.optica-opn.org/home/articles/volume_29/march_201...