Actually generating x-rays is easy. Every dentist office has a "high-luminosity" x-ray generator But x-rays are too short-wave for EUV. Maybe they have conside

Actually generating x-rays is easy. Every dentist office has a "high-luminosity" x-ray generator But x-rays are too short-wave for EUV. Maybe they have considered some form of down-conversion from x-rays for EUV but at those wavelengths it's not very trivial.