When they changed from planar transistors to more 3D-like transistors like FinFET, I believe. I'm pretty sure 55nm and probably 28nm still has minimum pitch of

When they changed from planar transistors to more 3D-like transistors like FinFET, I believe. I'm pretty sure 55nm and probably 28nm still has minimum pitch of that size. Problem was that people had certain expectation that a "45nm" process could fit more transistors than "90nm" one. Would be kind of awkward to name it like "22nm++++" and you have no idea roughly how much better it was than the old planar "22nm" process.