That is a big family of chemical compounds, so it is not easy to give an easy answer. I think that you are referring to a specific subset, fluoropolymers, also

That is a big family of chemical compounds, so it is not easy to give an easy answer. I think that you are referring to a specific subset, fluoropolymers, also called "forever chemicals", like PTFE/Teflon/Goretex. They do not release in the air the most studied PFAS (like PFOA) under controlled condition, but more studies are needed to see if the same happens in commercially run incinerators. What is the alternative? Landfill. PFAS are more concentrated in landfills, which accept non-incinerated ashes/waste. What seems to be a valid general guideline for incineration? The higher the temperature, the better. I found a nice report if you are interested: "Disposal of products and materials containing per- and polyfluoroalkyl substances (PFAS): A cyclical problem"