4 ms·
It's because photoresist is sensitive to deep blue out to UV so you want to avoid that kind of light as wafers with photoresist applied but not-yet-exposed are
by xyzzy21 5y ago
It's because photoresist is sensitive to deep blue out to UV so you want to avoid that kind of light as wafers with photoresist applied but not-yet-exposed are running around in their robotic FOUPs through the facility.
It's exactly analogous to red safe lights used for film print photography.