This is a great project. I am wondering which litography beam is used to develop the photomask for the state-of-the-art ASML EUV scanner: electron or laser? A

This is a great project. I am wondering which litography beam is used to develop the photomask for the state-of-the-art ASML EUV scanner: electron or laser? And what is the minimum feature size on those quartz(?) photomasks?