Yes, to emphasize: "nm" marketing is just marketing. There is no dimension on a 5nm chip that is actually 5nm. It used to represent gate length and half-pitch

Yes, to emphasize: "nm" marketing is just marketing. There is no dimension on a 5nm chip that is actually 5nm. It used to represent gate length and half-pitch but that stopped being true about 20 years ago and officially became nonsense about 10 years ago, it's "what size planar node do we think these features would perform like" now. Because it's all subjective now, companies went wild with marketing, because consumers know "lower nm => better". But, say, GF 14nm is much more comparable to Intel 22nm, and GF 12nm is still solidly behind late-gen 14++, probably more comparable to TSMC 16nm. Generally Intel has been the most faithful to the "original" ratings, while TSMC has stretched it a little, and GF/IBM and Samsung have been pretty deceptive with their namings. Intel finally threw in the towel a year or so ago and moved to align their names with TSMC, "10nm ESF" is now "Intel 7" (note: no nm) and is roughly comparable with TSMC 7nm (seems like higher clocks at the top/worse efficiency at the bottom but broadly similar), and they will maintain TSMC-comparable node names going forward. Anyway, to answer OP's question directly though, "what comes after 1nm" is angstroms. You'll see node names like *90A or whatever, even though that continues to be completely ridiculous in terms of the actual node measurements.