The cost per transistor is going up because the latest nodes require too many process steps. An older node might require 90 steps, the lastest nodes require 9

The cost per transistor is going up because the latest nodes require too many process steps. An older node might require 90 steps, the lastest nodes require 900 steps. Every step requires a "tool" and every step has a chance of yield loss. The transistor is getting harder to make faster then it is getting smaller. The new EUV steppers with soft x-ray wavelength can do in one shot what took 4 shots with 193nm ArF tools. And for each shot you have to apply, bake, develop inspect and strip the resist. This was supposed to help but the EUV steppers are so expensive it is kind of a wash price wise.