There are a few options for smaller fabs. There's SiView from IBM, a few products from Inficon which can handle much of an MES's capabilities and some others:

There are a few options for smaller fabs. There's SiView from IBM, a few products from Inficon which can handle much of an MES's capabilities and some others: [1] https://www.ibm.com/products/siview https://www.ibm.com/products/siview [2] https://ims.inficon.com/ https://ims.inficon.com/ [3] https://kontron-ais.com/en/products/factory-automation/fabeagle-mes/ https://kontron-ais.com/en/products/factory-automation/fabea... [4] https://www.peergroup.com/expertise/factories/factory-automation/ https://www.peergroup.com/expertise/factories/factory-automa... I'd bet there is a reasonable market for a good SAAS MES, or at least parts of a total solution. I imagine that you would want at last part of the solution to be on-prem, to avoid shuttling the large amounts of data that process tools are producing offsite.