You can read the SEMI standards. All of this is thoroughly standardized to allow interoperability between equipment from different suppliers. SECS (SEMI Equipm

You can read the SEMI standards. All of this is thoroughly standardized to allow interoperability between equipment from different suppliers. SECS (SEMI Equipment Communications Standard) and GEM (Generic Model for Communications and Control of Manufacturing Equipment) will be of particular interest. https://www.semi.org/en/industry-groups/smart-manufacturing/standards https://www.semi.org/en/industry-groups/smart-manufacturing/...