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Non-volatile memory usually can't shrink to structures small enough to require EUV without either becoming volatile memory or reducing endurance down to a handf
by wtallis 5y ago
Non-volatile memory usually can't shrink to structures small enough to require EUV without either becoming volatile memory or reducing endurance down to a handful of write cycles. Most R&D on non-volatile memories is focused on novel materials and structures that can be made cheaply without needing EUV or quad-patterned DUV.
You especially don't want to be building a 3d memory array with dozens of layers of cells if each layer requires a few EUV steps. That's never going to lead to economical high-volume manufacturing.