I don't know about the whole fabs, but the machines that ASML makes are incredibly precise and powerful. They are built and stay in vacuum, so even shipping the

I don't know about the whole fabs, but the machines that ASML makes are incredibly precise and powerful. They are built and stay in vacuum, so even shipping them costs millions. And the laser that powers them is room sized; it would probably make a decent weapon for a battleship too. So I think the cost is largely that every part must be engineered to perfection.