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Extreme ultraviolet, as used in lithography : https://en.m.wikipedia.org/wiki/Extreme_ultraviolet_lithography https://en.m.wikipedia.org/wiki/Extreme_ultraviole

• jaclaz 5y ago
  https://bits-chips.nl/artikel/asml-for-beginners/ https://bits-chips.nl/artikel/asml-for-beginners/ – DUV: Deep ultraviolet, a wavelength range in the far ultraviolet. Chip production uses 248 and 193 nanometres. – EUV: Extreme ultraviolet, the wavelength range between roughly 100 and 10 nanometres. In chip manufacture, used as an abbreviation for EUV lithography (also abbreviated EUVL), that is, lithography with light at a wavelength of 13.5 nanometres. EUV is expected to be used in production before 2020.