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The one of the widely used light sources for EUV lithography uses a laser to zap molten tin to get the tin plasma to ionize and emit EUV light. It's fairly exo
by scheme271 5y ago
The one of the widely used light sources for EUV lithography uses a laser to zap molten tin to get the tin plasma to ionize and emit EUV light. It's fairly exotic and really inefficient but is needed for the smaller node sizes.