Very cool! Fantastic that they were able to do this in silicon nitride, as that'll make commercialization and scalability much easier. Nitride is one of the mor

Very cool! Fantastic that they were able to do this in silicon nitride, as that'll make commercialization and scalability much easier. Nitride is one of the more common MEMS manufacturing materials, and from the (admittedly tiny, which makes sense since they're trying to commercialize) fabrication section of the paper it seems like they're using a standard RIE process to manufacture the optical posts. I'm interested to know how they controlled for the isotropy of the plasma process without using DRIE, which is frequently used for these kinds of high aspect-ratio devices.