Silane, phosphene, and diborane gases are used to form epitaxial layers on silicon wafers. Those are truly dangerous gases. However, a simple wafer process usin

Silane, phosphene, and diborane gases are used to form epitaxial layers on silicon wafers. Those are truly dangerous gases. However, a simple wafer process using the reagents I mentioned can produce very credible ICs, if one buys the epi wafers.